A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample.
A scanning electron microscope (SEM) is a type of electron microscope that produces images of a sample by scanning the surface with a focused beam of electrons. The electrons interact with atoms in the sample, producing various signals that contain information about the surface topography and composition of the sample.
Ease of operation based on high quality optics
Fully automated electron gun
Zoom condenser lens
Super conical objective lens
Scanning system for ultra low magnification
GUI for “Intuitive Operation”
Icons with simple text
Large pictures for comparison and stage navigation
Multi user environment
Multi desciplinary large specimen stage and chamber
Large specimen chamber with multiple accessory ports
Large eucentric specimen stage with full 5 axes computer control
Tall and large specimen (200mmø, 80mmH)
Expandable to analytical system
Elemental analysis (EDS * / WDS *)
Crystal analysis (EBSD *)
* Option
From Non Conductive Specimens to Wet Specimens The Low Vacuum SEM JSM-6460LV
The low vacuum SEM, JSM-6460LV, has the low cacuum SEM mode in addition to the conventional high vacuum SEM mode. The low vacuum SEM lets you observe a nonconductive specimen as is and then analyze with EDS. The low vacuum SEM easily handles a specimen with much outgassing. Wet specimens can be observed quickly with JEOL's patented freeze dry method.
Principle of Low Vacuum SEM
A small amount of air is introduced into the specimen chamber. These air molecules, oxygen and nitrogen, are ionized with the surface of the specimen and eliminate charge up effect so that a non conductive specimen can be observed.
Backscattered Electron Detector
The conventional secondary electron detector, Everhart and Thornley detector, does not function in the low vacuum environment. A backscattered electron detector is widely used instead. JEOL has developed the high sensitivity semi-conductor backscattered electron detector, which produces the composition, the topography, and the shadowed contrast. This unique detector is patented to JEOL.
Secondary Electron Detector for the Low Vacuum SEM Mode
JEOL has developed a secondary electron detector, which works in the low vacuum environment. Secondary electron images are suitable for observation of surface.